Effect of annealing conditions on the physio-chemical properties of spin-coated As2Se3 chalcogenide glass films

Thin film selenide glasses have emerged as an important material for integrated photonics due to its high refractive index, mid-IR transparency and high non-linear optical indices. We prepared high-quality As2Se3 glass films using spin coating from ethylenediamine solutions. The physio-chemical properties of the films are characterized as a function of annealing conditions. Compared to bulk glasses, as-deposited films possess a distinctively different network structure due to presence of Se-Se homopolar bonds and residual solvent. Annealing partially recovers the As-Se3 pyramid structure and brings the film refractive indices close to the bulk value. 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